Fabrication of inverted pyramidal pits with Nano-opening by laser interference lithography and wet etching
نویسندگان
چکیده
Article history: Received 29 March 2016 Received in revised form 7 June 2016 Accepted 20 June 2016 Available online 21 June 2016 In this work we demonstrate a fabrication process for three-dimensional (3D) container, which is composed of inverted pyramidal pit (IPP) and a capwith nanosized opening fabricated by combining laser interference lithography and anisotropic wet etching processes. The advantages of this method lie in the tunable volume of the pyramidal pit and the diameter of the nano-opening, and its wafer-scale fabrication process. To demonstrate the optical properties of this 3D container, Au film was deposited on the structure through nanosized opening to form a 3D plasmonic nanostructure including above Au hole-arrays and under Au inverted cone. A blue-shift of the absorption dip with the increasing of Au film thickness was observed by study the reflection spectra of 3D plasmonic nanostructure. © 2016 Elsevier B.V. All rights reserved.
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